Home | Sensors&Transmitters| Gas Sensor| MEMS gas sensors

Thermal Conductivity Gauge - XEN-3880-RW

? Long-term stable analysis of gases in binary and quasi-binary mixtures
? High sensitivity and resolution
? Operating temperature: -250℃ to 150℃
? Humidity: 0 to 95% RH, non-condensing
? Negligible flow sensitivity

Model Number: XEN-3880-RW
Data Sheet:

Quantity:: - +

Inquire Now Add to cart

Mouse over image to zoom

Product Specification

The XEN-3880-RW thermal conductivity gauge measures thermal conductivity of the surrounding gas. Operating on the principle that gases differ in their thermal conductivity, it can be used to measure gas concentration in binary mixtures or quasi-binary mixtures where component gases have different thermal conductivity. It can also be used to measure pressure in vacuum systems.

The sensor chip consists of a silicon frame with a silicon-nitride membrane. In the center is a heater, with a thermopile measuring its temperature. The chip measures the thermal conductance between the ambient and the center of the membrane.

A silicon cover (Roof) on top of the membrane and a welded cap with filter (W) suppress flow sensitivity.

Features

? Long-term stable analysis of gases in binary and quasi-binary mixtures

? High sensitivity and resolution

? Operating temperature: -250℃ to 150℃

? Humidity: 0 to 95% RH, non-condensing

? Negligible flow sensitivity

Some Applications

? Hydrogen, helium and natural gas measurement

? Testing of hydrogen systems with helium

? Vacuum measurement in packages & vacuum systems

? Gas concentration measurement

Technical Specification

Ambient temperature 22℃ and 1 V power supply

Dimensions
size naked die (mm³)	2.50 x 3.33 x 0.3
Size TO-5 header (mm²)	9 Ф x 6
Length pins (mm)	13.5
weight on TO-5 (g)	0.71
weight on TO-5 + cap + filter (g)	1.05
Output
in vacuum at < 1 mPa (V/W)	130
in air at 100 kPa (V/W)	30
in air at 10 MPa (V/W)	26
in helium at 100 kPa (V/W)	7
in helium at 10 MPa (V/W)	6.9
Time constant
in air (ms)	9
in vacuum (ms)	36
Stability
short term, 1 day (ppm)	1
long term, 1 year (ppm)	300
Thermal resistance
membrane (kK/W)	100
membrane + air (kK/W)	23
Maximum heating voltage
in air (V)	2.5
in vacuum (V)	1