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High precision large range mass flow controller - MFC2000

? Mass flow, time domain sensing technology
? The range ratio is 100:1
? can measure a wide range of gases without special correction
? Mechanical interfaces can be customized
? A variety of standard communication options are available

Model Number: MFC2000

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Product Specification

Product presentation：

? ? The MFC2000 series mass flow controllers utilize the company's proprietary MEMS Thermal D Operation heat sensing technology with intelligent control electronics. This unique mass flow sensing technology eliminates the gas sensitivity of some gases with similar diffusivity and allows gas identification after programming. This product can be used for process control with a dynamic range of 100:1, with a pressure range of 0.1 to 1MPa(15 to 150 PSI) and a compensation temperature of 0 to 50C. The product is designed for easy replacement of mechanical connectors, standard connectors are NPT1/8 "to 1/2", and other custom connectors are available on request.

? ? ?For non-corrosive gas flow control applications, full size mass flow from 50sccm to 200slpm with analog set point or RS485 Modbus interface for mass flow control.

Characteristics and application

??Mass flow, time domain sensing technology

??The range ratio is 100:1

??can measure a wide range of gases without special correction

??Mechanical interfaces can be customized

??A variety of standard communication options are available

??The sensor surface is passivated with a silicon nitride ceramic material and a water/oil resistant nano coating to improve performance and reliability. The technology also provides better linearity and increased temperature

It can be mainly used in various mass flow control applications, such as chemical reaction units, medical equipment, environmental monitoring, energy and other fields.

Technical specifications?

All specifications listed in the following table unless otherwise noted apply for calibration conditions at 0 °C and 101.325 kPa absolute pressure with air. The product is horizontally mounted at the time of calibration.

?	Value	Unit
Full-scale range	Full-scale range 0 ~ 50 sccm…0 ~ 1000 sccm 0 ~ 2 … 0 ~ 200 SLPM	?
Accuracy	± 1.5% r.d. (20 ~ 100% of full scale) ±0.3% f.s. (<20% of full scale)	?
Repeatability	± 0.5% r.d. (20 ~ 100% of full scale) ±0.1% f.s. (<20% of full scale)	?
Turn-down ratio	100:1	?
Max control range	120	%FS
Control pressure range	0.1 ~ 0.8	MPa
Maximum operating differential pressure	0.4	MPa
Setpoint voltage	0 ~ 5.0	Vdc
Settling time	100	msec
Working temperature	0 ~ 55	°C
Humidity	<95, no condensation	%RH
Burst pressure	1.5	MPa
Max pressure loss	80 (100 SLPM models)	kPa
Power supply	8 ~ 24	Vdc
Analog output	0 ~ 5.0	Vdc
Max null shift (analog)	±30	mVdc
Control valve	Normally Closed (NC)	?
Digital output*	RS485 Modbus	?
Electrical connector	DB9	?
Mechanical connection	1/8”… 1/2” FNPT	?
Protection	IP40	?
Storage temperature	-20 ~ 70	?
Reference conditions	0 °C, 101.325 kPa, air	?
CE	EN61000-2; -3; -4	?
Environmental	RoHS, REACH	?

Mechanical dimensions?

Different ranges correspond to different sizes

Product selection

The product part number is composed of the product model number and suffixes indicating the fullscale flow rate, as well as the other parameters. Refer to the following for details.